在过去的10年中，纳米技术的飞速发展使得扫描电子显微镜成为了一种分析和构建新纳米材料、结构和器件不可缺少的有力的工具。新纳米材料的发现需要通过先进的分析技术和技能来获取高质量的图片，从而帮助我们理解纳米结构，以达到改进合成方法和提高性能的目的。例如场发射枪、背散射电子的探测、X射线元素的图像化等，已经很大程度地提高了扫描电子显微镜在纳米材料分析中的应用。除了分析功能之外，扫描电子显微镜可以与最新发展起来的测控技术相结合，实行原位纳米器件的加工、制造和性能表征。这些技术包括纳米材料的操控、电子刻蚀、聚焦离子束微加工等。虽然这些技术仍在发展之中，但它们已开始广泛应用于纳米研究的各个领域。

Chapter 1  Fundamentals of Scanning Electron Microscopy

1.1 Introduction

1.2 Configuration of scanning electron microscopes

1.3 Specimen preparation

1.4 Conclusion

References 

Chapter 2  Electron Backscatter Diffraction(EBSD)Technique and Materials Characterization Examples

2.1 Introduction

2.2 Data measurement

2.3 Data analysis

2.4 Applications

2.5 Current limitations and fur

2.6 Conclusion

References 

Chapter 3  X-ray Microanalysis in Nanomaterials

3.1 Introduction

3.2 Monte Carlo modeling of nanomaterials

3.3 Case studies

3.4 Conclusion

References

Chapter 4  Low kV Scanning Electron Microscopy

4.1 IntrOductlon

4.2 Electron generation and accelerating voltage

4.3 Why use low kV?

4.4 Using low kV 

4.5 Conclusion

References 

Chapter 5  E-beam Nanolithography Integrated with Scanning Electron Microscope

5.1 Introduction

5.2 Materials and processing preparation

5.3 Pattern generation

5.4 Pattern processing

5.5 Applications

5.6 Conclusion

References

Chapter 6  Scanning Transmission Electron Microscopy for Nanostructure Characterization

6.1 Introduction

6.2 Imaging in the STEM

6.3 Spectroscopic imaging

6.4 Three-dimensional imaging

6.5 Recent applications to nanostructure characterization

6.6 Future directions 

References

Chapter 7  Introduction to ln-situ Nanomanipulation for Nanomaterials Engineering

7.1 Introduction

7.2 SEM Contamination

7.3 Types of nanomanipulators

7.4 End effectors

7.5 Applications of nanomanipulators

7.6 Conclusion

References

Chapter 8  Applications of FIB and DualBeam for Nanofabrication

8.1 Introductlon

8.2 Onboard digital patterning with the ion beam

8.3 FIB milling or CVD deposition with bitmap files

8.4 Onboard digital patterning with the electron beam

8.5 Automation for nanometer control

8.6 Direct fabrication of nanoscale structures

8.7 Conclusion

References

Chapter 9 Nanowires and Carbon Nanotubes

9.1 Introduction

9.2 Ⅲ-V compound semiconductors nanowires

9.3 Ⅱ-VI compound semiconductors nanowires

9.4 Elemental nanowires

9.5 Carbon nanotubes

9.6 Conclusion

References 

Chapter 10  Photonic Crystals and Devices

10.1 Introduction 

10.2 SEM imaging of photonic crystals

10.3 Fabrication of photonic crystals in SEM

10.4 Conclusion

References

Chapter 11  Nanoparticles and Colloidal Self-assembly

11.1 Introduction 

11.2 Metallic nanoparticles 

11.3 Mesoporous and nanoporous metal nanostructures

11.4 Nanocrvstalline oxides 

11.5 Nanostructured semiconductor and thermoelectric materials

11.6 Conclusion 

References

Chapter 12  Nano-building Blocks Fabricated through Templates

12.1 Introduction 

12.2 Materials and methods

12.3 Nano-building blocks

12.4 Conclusion

References

Chapter 13  One-dimensional Wurtzite Semiconducting Nanostructures

13.1 Introduction 

13.2 Synthesis and fabrication of one—dimensional nanostructures

13.3 One-dimensional metal oxide nanostructures

13.4 Growth mechanisms 

13.5 Conclusion

References

Chapter 14  Bio-inspired Nanomaterials

14.1 Introduction

14.2 Nanofibers

14.3 Nanoparticles

14.4 Surface modification

14.5 Conclusion

References

Chapter 15 Cryo-Temperature Stages in Nanostructural Research

15.1 Introduction

15.2 Terminology used in cryo-HRSEM of aqueous systems

15.3 Liquid water，ice，and vitrified water

15.4 History of 10W temperature SEM

15.5 Instrumentation and methods

References